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Metrology & Instrumentation: Polymer Imaging
AFM Instrumentation
The Digital Insturments MultiMode, Dimension 3100 and Dimension 5000, which are manufactured by our company, can be successfully applied for studies of polymer samples. These microscopes have a lot of common features. They operate with the same electronic controllers Nanoscope IIIa and Nanoscope IV. Therefore, all microscopes accommodate most AFM modes and allow imaging of surfaces on areas up to 150 microns on side. There are a number of individual features of microscopes that can be taken into consideration.
The Digital Instruments MultiMode Microscope
A MultiMode microscope has a compact design (coffee-maker size) that minimizes the efforts required for its isolation from acoustic and vibration noise. It takes relatively small samples (up to 1 cm2), but it has advantage of achieving the highest AFM resolution. This is largely facilitated by use of small-range scanners (a scanner type A: maximal scanning area -~ 1 micron on side or scanner type E: maximal scanning 15 micron onside) that can attain an ultimate atomic or molecular lattice resolution of periodical surface atomic structures in contact mode operation. The X-Y navigation of an AFM probe to a surface location of interest is easily performed with the use of an 8X external optical microscope. A manual “A” tripod with bungee cords is a good choice for vibration noise protection. Air-bearing tables can be also applied especially when both the MultiMode and optical microscope must to be positioned together. MultiMode is also can be equipped with high-temperature accessory suitable for AFM imaging at elevated temperatures up to 250C. A cooling stage down to -40C for this microscope is under development.
The Digital Instruments Dimension 3100 and Dimension 5000.
These microscopes, somewhat larger than the Multimode have been designed for AFM imaging of large samples such as Si wafers. They have embedded optical microscopes and automated XY positional stages. The Dimension microscopes are typically placed on air-bearing tables and in acoustic-protection enclosures. The Dimension 5000 microscope has higher quality XY-stage and a better enclosure than Dimension 3100. This minimizes thermal drift allowing high resolution imaging on sub 100nm scale. Therefore this instrument is the best choice for high resolution and high throughput imaging that is becoming a requirement for industry and research.