离子束沉积

利用离子束沉积 (IBD) 系统打造具有最大一致性和可重复性的高精度、高纯度薄膜器件。

Veeco’s Frank Cerio, Ph.D., a leading process development engineer, presented at the IEEE International Interconnect Technology Conference (IITC). The presentation, Microstructural Optimization of Tungsten for Low Resistivity Using Ion Beam Deposition, was also presented as a poster. Watch now:

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