Veeco’s Ion Beam Deposition System Chosen By Mask Blank Supplier for EUV Mask Blanks

新闻 | Feb 10, 2022

Plainview, N.Y. — Veeco Instruments Inc. (NASDAQ: VECO) today announced that a mask blank supplier to the semiconductor industry has ordered Veeco’s IBD-LDD® Ion Beam Deposition (IBD) System. The IBD system will be used to meet growing demand for extreme ultraviolet (EUV) mask blanks used to create semiconductor devices related to advanced logic and memory applications. This new customer is acquiring Veeco’s IBD technology for low defect EUV mask blanks intended for high volume production.

“This purchase reaffirms Veeco’s leadership position in low defect density deposition required for EUV mask blanks,” commented Adrian Devasahayam, Ph.D., Senior Vice President, Product Line Management. “We have been serving the world’s EUV mask blank manufacturers with unmatched technology and exceptional process know-how for over 20 years. The IBD-LDD is the only platform that meets demanding particle defect specifications while providing excellent repeatability and yield. As advanced logic and memory devices require smaller geometries, our proven technology and strong product roadmap make Veeco the ideal supplier now and for years to come.”

Veeco’s IBD technology leads the industry in high film quality, featuring extremely low defect density and precise control of optical properties for single or multi-layer processes. These technology features are required for defect-free, high volume EUV manufacturing. Currently, all leading EUV mask blank manufacturers use the Veeco IBD-LDD system.

关于 Veeco
Veeco (NASDAQ: VECO) is an innovative manufacturer of semiconductor process equipment. Our proven ion beam, laser annealing, lithography, MOCVD and single wafer etch & clean technologies play an integral role in the fabrication and packaging of advanced semiconductor devices. With equipment designed to optimize performance, yield and cost of ownership, Veeco holds leading technology positions in the markets we serve. To learn more about Veeco’s systems and service offerings, visit www.veeco.com.

To the extent that this news release discusses expectations or otherwise makes statements about the future, such statements are forward-looking and are subject to a number of risks and uncertainties that could cause actual results to differ materially from the statements made. These factors include the risks discussed in the Business Description and Management’s Discussion and Analysis sections of Veeco’s Annual Report on Form 10-K for the year ended December 31, 2020 and in our subsequent quarterly reports on Form 10-Q, current reports on Form 8-K and press releases. Veeco does not undertake any obligation to update any forward-looking statements to reflect future events or circumstances after the date of such statements.

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Veeco Contacts
Investors: Anthony Bencivenga (516) 252-1438 abencivenga@veeco.com
Media: Kevin Long (516) 714-3978 klong@veeco.com