湿法处理系统
使用可持续实践进行表面预处理对于确保用于汽车应用、医疗设备、5G 和云存储的高级微电子产品的可靠性至关重要。
Wet Processing Application Suite: WaferStorm Platform
- Metal Lift-Off
- Photoresist/Dry Film Strip
- Flux Clean
- Scrubber
- TSV Clean
WaferEtch Platform
- UBM/RDL Etch
- Compound Semiconductor Etch and Silicon Thinning
Making a Material Difference with Wet Process Technology:
- High uniformity combined with low defectivity
- Flexible design to meet a wide range of process requirements
- Proprietary immJET technology combines batch immersion and single wafer spray processing
The WaferStorm platform is the industry choice for a number of critical solvent-based processes in the advanced packaging, MEMs,…
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The WaferEtch platform is the industry choice for a number of critical aqueous-based processes in the advanced packaging, MEMs,…
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